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Benefits of retrofitting 200mm and 150mm process tools with a diffuser in applications where loadlock vent-up time is a rate-limiting step and/or particles in the loadlock are an issue.
By Chris Vroman, Chris Quartaro, Marshall Randolph
November/December 2008
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Reactions to Gases & Instrumentation™ | Advanced Diffuser Technology Helps Reduce Vent-Up Times While Maintaining Water Integrity on Vacuum Tools Loadlock Chambers
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